Description
M/C Type | Manual loading Automatic cleaning |
---|---|
Cleaning Target | Glass/ISM/IR filter/Wafer etc |
CO2 Jet Cleaner | SM201 / S201 / SS201 (Selectable) |
Cleaning Mode | Standard : XY Scanning |
Optional : Spinning (up to 300mm) | |
Cleaning Area | Max. 300 X 150mm @X-Y |
Dimension | 1200L x 1200W x 1800H mm |
Utilities | 220VAC, 50/60Hz, 1 Phase, 20A |
CDA : 5~8kg/cm² | |
Option | Suction Unit / ULPA filter |
Warranty : 1 year warranty