Description
| M/C Type | Manual loading Automatic cleaning |
|---|---|
| Cleaning Target | Glass/ISM/IR filter/Wafer etc |
| CO2 Jet Cleaner | SM201 / S201 / SS201 (Selectable) |
| Cleaning Mode | Standard : XY Scanning |
| Optional : Spinning (up to 300mm) | |
| Cleaning Area | Max. 300 X 150mm @X-Y |
| Dimension | 1200L x 1200W x 1800H mm |
| Utilities | 220VAC, 50/60Hz, 1 Phase, 20A |
| CDA : 5~8kg/cm² | |
| Option | Suction Unit / ULPA filter |
Warranty : 1 year warranty
