RM1010-LLC
RM1010-LLC
Low Leakage Relay Matrix Mainframe
RM1010-LLC is a 4-slot switch matrix that can meet high-speed semiconductor test applications by integrating S3022F benchtop or S2012C PXle SMU. Easy-to-use GUI helps to speed up the development of new test functions and simplify system integration. It supports traditional SCPI commands, enabling easy and fast programming of test code. It can support multi-machine parallel connection to achieve test efficiency improvement and cost reduction.
Features
Multi-channel Flexible Measurement
Supports for 2-channel low leakage current input
Supports 14 input channels and 48 output channels
Low Leakage Current
The minimum achievable leakage current ＜100 fA
Rapid Measurement
The establishment time of weak current ＜3.5s
(The time from the start of 10V voltage input to the current <400 fA)
High Relay Contact Life
The switch life ＞10^8 times
10MHz BW
Optimize the transmission bandwidth of C-V and HF channels
Reduce the high-frequency attenuation of the line
Supports 2 Control Methods
Run the upper computer GUI software on the PC
Standard commands SCPI through programmable instruments
Functions and Advantages
Precise, Consistent Results
- Supports 2 channels of low leakage current input, the whole machine supports 14 inputs and 48 outputs.
- Can be used with high-precision SMUs (such as S2036H, S2016C, etc.), with a leakage current of less than 100 fA.
| Specification | |
| Input Channels | 2（Low Leakage I-V Port） 6（General I-V Port） 2（C-V Port） 2（DMM Port） 2（PGU Port） |
| Ouput Channels | 12/24/36/48 |
| Max. Current Rating | 1 A |
| Max. Voltage Rating | 200V（Channel to Ground） 300V (Channel to Channel) |
| Close Ch Residual R | 0.6 Ω（Low Leakage I-V Port） 1.0 Ω（General I-V Port） 1.0 Ω（C-V, HF Port） |
| Ch Isolation R[1] | 1013 Ω（Low Leakage I-V Port） 1012 Ω（General I-V Port） 109 Ω（C-V, HF Port） |
| Typical Data | |
| Offset Current | ＜100fA（Low Leakage I-V Port） ＜1000pA（General I-V Port） |
| Offset Voltage, Electro Motive Force (EMF) at 5 min | ＜80μV（Low Leakage I-V Port） ＜110μV（General I-V Port） ＜110μV（C-V, HF Port） |
| Channel Crosstalk Capacitance | ＜0.3pF/CH |
Note:
[1] Insulation resistance test environment: 23℃± 5℃, 5% to 60% RH