AL3500A
Wafer Auto Loading/Unloading System
AL3500A is an automated auxiliary equipment for Wafer Level Burn-In System WLR3500, assist the operator to complete the wafer alignment and fixture automatic installation.
- Adapter products – Support 4-6-inch wafer load/unload automatically, Wafer thickness>150 um
- Quantity – Wafer quantity≤25 pcs, Fixture quantity≤6 pcs
- Speed – <8 min/pcs
- Position accuracy – ±50 um
Functions and advantages
System architecture
| Wafer size | 4, 6 inch |
| Dimension | 1500 mm(W)×1800 mm(H)×1400 mm(D) |
| Power dissipation | 3 kW |
| Wafer quantity | ≤25 pcs |
| Fixture quantity | ≤6 pcs |
| Speed | <8 min/pcs |
| Position accuracy | ±50 um |