WAT6300
High Voltage Parametric Test System
WAT6300 is a serial high-voltage semiconductor parametric test system. The system is configurable to realize vertical and universal high-voltage tests, and it can quickly perform accurate high and low voltage DC measurements, capacitance measurements, etc.
- Self-developed hardware resources – Self-developed SMU & HV-SMU, PGU, Low-leakage Switch Matrix,
HV Switch Matrix, Stable supply chain, short lead time - 3500V high voltage – Meet very high voltage test for SiC, GaN
- Flexible configuration of Pin number – Support 48 pin full kelvin pins
- High precision – System leakage current ＜ 1pA, Extremely low current measurement
- SECS/GEM compliance – Easy integration to customer EAP or factory automation
- Built-in Maintenance software – CAL/DIAG/PV, Fast troubleshooting and diagnostic of hardware problem
- 48pin 230mm-diamter probe card – Protect customer investment on probe card, low migration cost to new tester
- Compatible with mainstream probers –TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
System Configuration
| # | Category | Sub-Category | Description |
| 1 | System Cabinet | Cabinet | Rack, EMO, Power Supply and Distribution Unit |
| Controller | Win10 Workstation, ptSEMIGHT software suites | ||
| LCR | Optional
1fF~100nF range Frequency:1KHz~1MHz |
||
| DMM | Optional
7 ½ display resolution |
||
| Signal Analyzer | Optional
9K~10M frequency range |
||
| Vertical High Voltage Switch Matrix | RM1012-HV (Optional):
2 low voltage channels(200V), 1 high voltage channel(3500V), 1 input port for CMU with 3000V HV-bias, 1 output port to prober chuck |
||
| High Voltage SMU | Optional:
3500V, 120mA, 100uV/10fA (Semight S3030F) 1100V, 1A, 100nV/10fA (Commercial SMU) |
||
| 2 | Test Head | Test Head Mainframe | Mainframe, PXIe chassis for SMU & PGU |
| Low-leakage Switch Matrix | RM1010-LLC1:
Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs)
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
||
| Universal High Voltage Switch Matrix | RM1013-HV (Optional):
Universal HV Switch Matrix mainframe, 10 input ports (2 for 3500V), 3x R1013G-HV daughter cards for maximum 24 output ports
R1013G-HV (Optional): Universal HV Switch Matrix daughter card, 8 output ports, each port supports 3500V, 1A and <1pA@10V leakage |
||
| Source Measure Unit
(SMU) |
S2012C (optional):
1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
||
| Semiconductor Pulse Generator
(SPGU) |
S3023P (optional):
2x PCIe slots, ±40V(Open), ±20V(50Ω) |
- 600V for 48 output channels; 3500V for 24 output channels
System Functionality
| Application | |
| High voltage WAT test for Si/GaN/SiC, WLR | |
| Test Items (typical) | |
| IV/CV | Id-Vd，Id-Vg，Vth，BV，Ig，Ioff，Gm |
| MIM_CAP，C & G | |
| Ic-Vc，BETA，BV | |
| Ron，R_tlm，Rsh_van | |
| Spot，Sweep，Search | |
| Kelvin & Non-Kelvin | |
| Differential Voltage | |
| Frequency | Frequency |
| Reliability | HCI，BTI/NBTI，TDDB |
| DC | |
| Resource | Semight S2012C，S2016C, S3030F, Commercial SMU |
| Function | Spot, Sweep |
| Range | S2012C：10fA to 1A 100nV to 200V |
| S2016C: 1fA to 1A 100nV to 200V | |
| S3030F: 10fA to 120mA 100uV to 3500V | |
| Commercial SMU: 10fA to 1A 100nV to 1000V | |
| Capacitance | |
| Resource | External LCR |
| Function | C/G |
| Frequency | 1kHz, 10kHz, 100kHz, 1MHz |
| Range | 1fF to 100nF |
| DC Bias | ±40 V |
| HV DC Bias | ±3000 V |
| Differential Voltage | |
| Resource | External DMM |
| Range | 1µV to 100V |
| Pulse Generation | |
| Resource | Semight S3023P |
| Amplitude | ±40V (Open), ±20V(50Ω) |
| Frequency | 0.1Hz to 10MHz |
| Pulse Width | 60 ns to (Period – 60 ns) |
| Tr/Tf | 20 ns (Vamp < 5V, Open） |
| Frequency Measurement | |
| Resource | External Signal Analyzer |
| Frequency Range | 9K to 10M Hz |
| Low-leakage Switch Matrix | |
| Switch Matrix | Semight RM1010-LLC |
| Output Channels | x12, x24, x36, x48 |
| Interface | Maximum 8 input SMUs (2 for low leakage) |
| Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) | |
| Vertical High Voltage Switch Matrix | |
| Switch Matrix | Semight RM1012-HV |
| Output | 1 output port |
| Input | 4 input ports: 2 for LV (200V), 1 for HV (3500V), 1 for CMU with 3000V HV-bias |
| Universal High Voltage Switch Matrix | |
| Switch Matrix | Semight RM1013-HV |
| Output | x8, x16, x24, CHUCK |
| Input | Maximum 10 input ports: 6x for SMUs, 2x for 3-1 MUX ports used by external instruments, 2x HV ports (3500V) |