WAT6600
Parallel Parametric Test System
WAT6600 is a high efficiency parallel parametric test system that can quickly perform accurate DC measurements, capacitance measurements, and other high-frequency applications (such as ring oscillator measurements), flash memory tests and so on.
- Self-developed – Self-developed hardware and measurement resources, Stable supply chain, short lead time
- High output capability – Per-pin resource providing, SMU:200V max 1A max, PGU: ±20V
- Configurable Pin number – Maximum 48 Pin full kelvin
- High precision – The accuracy down to 1pA, system leakage current ＜500fA, Extremely low current measurement
- SECS/GEM compliance – Easy integration to customer EAP or factory automation
- Built-in Maintenance software – CAL/DIAG/PV, Fast troubleshooting and diagnostic of hardware problem, timely guarantee of tester performance
- Compatible with 48pin – 48pin 230mm-diamter probe card, Protect customer investment on probe card, low migration cost to new tester
- Compatible with mainstream probers –TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
System Configuration
| # | Category | Sub-Category | Description |
| 1 | System Cabinet | Cabinet | Rack, EMO
Power Supply and Distribution Unit |
| Controller | Win10 Workstation,
ptSEMIGHT software suites |
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| LCR | Optional
1fF~100nF range Frequency:1KHz~1MHz |
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| DMM | Optional
7 ½ display resolution |
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| Signal Analyzer | Optional
9K~10M frequency range |
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| PXIe Chassis | Optional
For external HV-SPGU |
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| Semiconductor Pulse Generator |
Optional（S3023P) ±40V(Open), ±20V(50Ω)
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| 2 | Test Head | Mainframe | Configurable pins |
| Pin Board | Semight S2018G:
Per-pin SMU: ±200V, ±1A, 100nV/1fA Per-pin PGU: ±20V(Open), ±10V(50Ω) |
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| Aux port | Default configuration:
8 BCN Port for external Instrument |
System Functionality
| Application | |
| Inline E-test, BEOL WAT, WLR for advanced process | |
| Test Items (typical) | |
| IV/CV | Id-Vd，Id-Vg，Vth，BV，Ig，Ioff，Gm |
| MIM_CAP，C & G | |
| Ic-Vc，BETA，BV | |
| Ron，R_tlm，Rsh_van | |
| Spot，Sweep，Search | |
| Kelvin & Non-Kelvin | |
| Differential Voltage | |
| Frequency | Ring Oscillator Frequency |
| Reliability | HCI，NBTI/PBTI，TDDB, etc. |
| DC | |
| Resource | Semight Per-pin SMU S2018G |
| Function | Spot, Sweep |
| S2018G: 1fA to 1A, 100nV to 200V | |
| Capacitance | |
| Resource | External LCR |
| Function | C/G |
| Frequency | 1kHz, 10kHz, 100kHz, 1MHz |
| Range | 1fF to 100nF |
| DC Bias | ±40 V |
| Differential Voltage | |
| Resource | External DMM |
| Range | 1µV to 100V |
| Pulse Generation | |
| Resource | Semight Per-pin PGU S2018G |
| Amplitude | ±20V (Open), ±10V(50Ω) |
| Frequency | 0.1Hz to 5MHz |
| Pulse Width | 100ns to (Period – 100ns) |
| Tr/Tf | <100ns (Typ 50ns） |
| Frequency Measurement | |
| Resource | External Signal Analyzer |
| Frequency Range | 9K to 20M Hz |