WLR0010
Multi-site
Wafer Level Reliability Test Equipment
The Semight WLR0010 Multi-site Wafer-Level Reliability (WLR) Test System is a reliability testing system developed based on JEDEC reliability test standards. The system mainly consists of a tester and a prober station. It can perform tests such as TDDB (Time-Dependent Dielectric Breakdown), HCI (Hot Carrier Injection), and NBTI (Negative Bias Temperature Instability). The testing system can operate at temperatures up to 200°C. Additionally, it employs algorithm models to analyze data, enabling the analysis of defects in the manufacturing process. Each channel of the system is equipped with independent overcurrent protection to ensure the safety of the devices under test.
- Custom Semi-automatic Probe Station – Supports 4-12inch wafers.
- Multi-site Testing Capability – Can test up to 16 sites simultaneously
- Nitrogen Protection – Platform unification Prevents wafer oxidation (non-pressurized)
- Real-time curve display – Real-Time Wafer Map and Test Curve Display
- Semight high-precision source meter – TDDB, HCI, NBTI, HTGB, Vth, and other reliability test modes
- Self-developed SMU – Adopt Semight high-precision source meter
Technical Specifications
| Parameter | Description |
| Operating Temperature | 15℃～55℃ |
| Storage Temperature | -10℃～50℃ |
| Operating Humidity | 40～60% |
| Storage Humidity | <90%（non-condensing） |
| Operating Altitude | 0～2000m |
| Power Supply | Main System: AC220V & 50/60Hz & 2KW
Prober: AC220V & 50/60Hz & 1KW Thermostat: AC220V & 50/60Hz & 2KW |
| EMC | Comply to EU EMC Standards |
| Safety | Comply to EU Safety Standards |
| Certification | Comply to CE or SEMI S2 Certification |
| Software Operating System | Linux |
| Programming | C#/C++ |
| Software Features | Test plan creation and setup, data display and analysis, MES interface, user access control, calibration and maintenance, fault diagnosis |
| Parameter | Description | |
| Prober | Wafer Size | 4～12 inch |
| Wafer Thickness | 100-2000μm | |
| Chuck Voltage | 500V（Max.） | |
| Chuck Current | 50A（Max.） | |
| X-Y Axis | 350mm*365mm | |
| Z Axis | ≥15mm | |
| Temperature Range | 25℃～200℃ | |
| Temperature Stability | 25~100℃ ≤±1℃
100~200℃ ≤±1% |
|
| Heating/ Cooling Rate
|
+25℃ to +200℃ : 30min
+200℃ to +25℃ : 50min |
|
| Probe Card | Based on customer requirement | |