WLR0200
Single-site Wafer Level Reliability Test Equipment
The WLR0200 Single-site Wafer-Level Reliability Test Equipment is a reliability test equipment designed and developed based on the JEDEC reliability test standard, which mainly consists of a tester and a probe table, and it can realize the test of TDDB/HCI/BTI/NBTI/QBD/AC BTI/CV/Vth and other functions.
- High temperature resistance – Probe table temperature up to 300 ℃
- Support 4-12 inch wafers – Using MPI customized high-temperature semi-automatic probe stations
- High testing frequency up to 1MHz – Using high-precision and high-frequency capacitance testing instruments
- Independently developed – The testing Source meter unit adopts high-precision SMU self-developed by Semight
- Multiple measurement modes – Supports TDDB/HCI/NBTI/EM test modes
- Real-time curve display – Real-Time Wafer Map and Test Curve Display
- Nitrogen Protection – Platform unification Prevents wafer oxidation (non-pressurized)
| System | Device size (W x D x H) | 1100mm; X 1150mm; X 2000mm | |
| System power | 2KVA | ||
| DUT; quantity | 1 Wafer | ||
| MES system interface | Support customized development and integration with customer MES systems and data | ||
| OS | WLR_ OS @ Windows; ten | ||
| Test monitor | OS | Windows; ten | |
| CPU | I7-10200 | ||
| storage | 16GB@ DDR4 | ||
| HDD | 2T; SSD | ||
| Ethernet | 10/100/1000base TX; X2 | ||
| display | 21.5; In Wide Monitor | ||
| Z1-PLUS | Wafer size | Up; To 12 Inch | |
| X-Y; Movement | Travel | 260mm (X) / 280mm (Y) | |
| Resolution | zero point one μ M (X) / zero point one μ M (Y) | ||
| Repeatability | one point five μ M | ||
| Z Movement | Travel | 10mm | |
| Resolution | 0.1μm | ||
| Repeatability | ±1μm | ||
| Theta Movement | Travel | ±7.5° | |
| Resolution | 0.0004° | ||
| Temperature | Temperature range | RT~300 ℃ | |
| Temperature uniformity | ± 1.5 ℃ @ 300 ℃ | ||
| Voltage & Current
Measurement |
Wafer Size | Up to 12 inch | |
| Current Accuracy | ±150mA | 0.2%+25μA | |
| ±15mA | 0.2%+5μA | ||
| ±1.5mA | 0.2%+150nA | ||
| ±150μA | 0.2%+20nA | ||
| ±15μA | 0.2%+3nA | ||
| ±1.5μA | 0.3%+600pA | ||
| ±150nA | 0.5%+300pA | ||
| Voltage Accuracy | ±200V | 0.2%+40mV | |
| ±20V | 0.2%+5mV | ||
| QBD
Current Accuracy |
±10mA | 0.2%+2μA | |
| ±1mA | 0.2%+100nA | ||
| ±100μA | 0.2%+20nA | ||
| ±10μA | 0.2%+2nA | ||
| AC BTI
Voltage Accuracy |
±55V | 0.5%+10mV@500KHz | |
| ±10V | 0.5%+2mV@500KHz | ||
| ±1V | 0.5%+1mV@500KHz | ||
| LCR parameters | Measurement parameters | Cs D, Cs Q, Cs Rs, Cp-D, Cp Q, Cp Rp, Cp-G | |
| Frequency | 120; Hz, 1 KHz, 1 MHz | ||
| Measurement accuracy | 120; Hz; (@ 100 uF, 0.5 V) | C: 0.085%, D: zero point zero zero zero six five | |
| 1 KHz; (@ 10 nF, 1 V) | C: 0.07%, D: zero point zero zero zero five | ||
| 1 MHz; (@ 10 pF, 1 V) | C: 0.07%, D: zero point zero zero zero five | ||
| Cable length | 0m, 1m, 2m | ||