RM1010-LLC
Low Leakage Switch Matrix
RM1010-LLC 4-slot semiconductor switch matrix can meet high-speed semiconductor test applications with S3022F benchtop or S2012C PXle plug-in card source measure unit. Easy to use GUI is also speeding up the development for new test functions and simplifying system integration. RM1010-LLC supports traditional SCPI commands, making the migration of test code easy and fast, it can support multi-machine parallel connection to improve system test efficiency and reduce costs.
- Precise, consistent results – 14 inputs and 48 outputs (up to 96 cross-nodes in low leakage matrix configuration)
- High resolution – 20 pA measurement resolution (With S3012H, S3022F, S2011C or S2012C SMU)
- Rapid measurement – Instantaneous current settling time<3.5 seconds(<450 fA,10V step)
- High-speed signal measurement – 10 MHz Bandwidth (at – 3dB)
- Flexible configuration – Modular design, Supports x12, x24, x36 and x48 three-axis output configurations
- LED display panel – Easy to use front panel design.
- PC GUI control software – Remote measurement and control from PC
- Convenient testing – Supports traditional SCPI commands
Functions and Advantages
Precise, consistent results
14 inputs and 48 outputs (up to 96 cross-nodes in low leakage matrix configuration) 20 pA measurement resolution(With S3012H, S3022F, S2011C or S2012C SMU)
| Secification | Input channels | 2（Low Leakage I-V Port） 6（General I-V Port） 2（C-V Port） 2（DMM Port） 2（PGU Port） |
| Ouput channels | 12/24/36/48 | |
| Max. Current rating | 1 A | |
| Max. Voltage rating | 200V（Channel to Ground） 300V (Channel to Channel) |
|
| Close Ch Residual R | 0.6 Ω（Low Leakage I-V Port） 1.0 Ω（General I-V Port） 1.0 Ω（C-V, HF Port） |
|
| Ch Isolation R1 | 10^13 Ω（Low Leakage I-V Port） 10^12 Ω（General I-V Port） 10^9 Ω（C-V, HF Port） |
|
| Typical Data | Offset current | ＜0.1pA（Low Leakage I-V Port） ＜1000pA（General I-V Port） |
| Offset voltage, Electro Motive Force (EMF) at 5 min | ＜80uV（Low Leakage I-V Port） ＜110uV（General I-V Port） ＜110uV（C-V, HF Port） |
|
| Channel Crosstalk Capacitance | ＜0.3pF/CH | |
| Additional C measurement Error | ＜±1%±0.5pF（C-V Port） | |
| Supplemental Information | ||
| Communication interface | USB/LAN | |
| Power Requirements | 100/120/220/240 V ± 10%, 47 Hz to 63 Hz | |
| Maximum VA | 100W | |
| Bandwidth（@ -3dB） | ＜10MHz (C-V, HF Port) | |
| Relay contact life | >108 times | |
| Settling time | < 3.5s（< 450 fA,10V step） | |
| Environment | Indoor use | |
| Work condition | 0℃~+40℃，5%~80 % (no condensation) | |
| Storage condition | -40℃~70℃，5%~90 % (no condensation) | |
| Altitude condition | Operating: 0 m~2000 m Storage：0 m ~4600 m |
Note:
- Insulation resistance test environment: 23℃± 5℃, 5% to 60% RH