S3022F
Dual-Channel Precision Source Meter
The S3022F precision source meter is compact and cost-effective bench-top Source/Measure Units (SMUs) with the capability to source and measure both voltage and current. These capabilities make the S3022F ideal for a wide variety of IV (current versus voltage) measurement tasks that require both high resolution and accuracy.
- High range – Range：±200 V、±3 A（DC）、±10A（pulse）
- High resolution – The minimum measurement resolution can reach 100 fA / 100 nV
- High sampling rate -Up to 1M ADC sampling rate
- Threshold trigger – Hardware high-speed IO, which can realize threshold triggering and realize efficient interaction between output measured value and user system
Functions and Advantages
Integration of five functions
Integration of five functions
Current source
Ammeter
Voltmeter
Electronic load
1. The first and third quadrants are the source: the actual polarity of the output V/I follows the source setting;
2. The second and fourth quadrants are the load: CC and CV cooperate, when the load is used, the load setting polarity is opposite to the source polarity;
Can test various equipment
Capture more measurement data
- 6.5-bit digital resolution: accuracy equivalent to6-and-a-half digitsA multimeter；
- 100 fa / 100 NV resolution: excellent sensitivity for setting and measuring；
- 1m points / second: provide high-speed measurement, and can quickly set / digitize the rate to any waveform generator / list scan；
Rich scanning function
Voltage source specifications
| Voltage programming accuracy | Range | Programming resolution | Accuracy (1 Year) ± (% reading+ offset) |
Typical Noise (RMS) 0.1 Hz-10 Hz |
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| ±200 V | 1 mV | 0.02%+30 mV | 1.5 mV | ||||
| ±20 V | 100 μV | 0.02%+2 mV | 160 μV | ||||
| ±6 V | 50 μV | 0.02%+500 μV | 36 μV | ||||
| ±200 mV | 1 μV | 0.02%+120 μV | 4 μV | ||||
| Temperature coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
| Maximum output power | 30W: ±20 [email protected] A, ±200 [email protected] A; 18 W: ±6 V@3 A | ||||||
| Settling time | <800 μs (typical) | ||||||
| Overshoot | <±0.1% (Typical. Normal mode. Step is 10 % to 90 % range, full range, resistive load) | ||||||
| Noise 10Hz-20MHz | 6 V voltage source, 3 A resistive load, <3 mVrms | ||||||
Current source specifications
| Current programming accuracy | Range | Programming resolution | Accuracy (1 Year) ± (% reading+ offset) |
Typical Noise (RMS) 0.1 Hz-10Hz |
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| ±10 A1 | 50 μA | 0.4% + 40 mA | NA | ||||
| ±3 A | 15 μA | 0.05% + 2 mA | 40 μA | ||||
| ±1.5 A | 10 μA | 0.02% + 500 μA | 20 μA | ||||
| ±150 mA | 1 μA | 0.02% + 25 μA | 5 μA | ||||
| ±15 mA | 100 nA | 0.02%+6 μA | 700 nA | ||||
| ±1.5 mA | 10 nA | 0.02% + 250 nA | 16 nA | ||||
| ±150 μA | 1 nA | 0.02% + 25 nA | 1 nA | ||||
| ±15 μA | 100 pA | 0.02% + 3 nA | 140 pA | ||||
| ±1.5 μA | 10 pA | 0.03% + 450 pA | 25 pA | ||||
| ±150 nA | 1 pA | 0.05%+250 pA | 5 pA | ||||
| Temperature coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
| Maximum output power | 30W: ±[email protected], ±[email protected]; 18W: ±6 V@3A | ||||||
| Settling time | <500 μs (typical) | ||||||
| Overshoot | <±0.1% (Typical. Normal mode. Step is 10 % to 90 % range, full range, resistive load) | ||||||
- 10 A range is available only for pulse mode, accuracy specifications for 10 A range are typical.
Voltage measurement specifications
| Voltage measurement accuracy | Range | Measurement resolution | Accuracy (1 Year) ± (% reading+ offset) |
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| ±200 V | 100 μV | 0.02% + 30 mV | |||||
| ±20 V | 10 μV | 0.02% + 2 mV | |||||
| ±6 V | 1 μV | 0.02% + 500 μV | |||||
| ±200 mV | 100 nV | 0.02% + 120 μV | |||||
| Temperature coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
Current measurement specifications
| Current measurement accuracy | Range | Measurement resolution | Accuracy (1 Year)± (% reading+ offset) | ||||
| ±10 A1 | 10 μA | 0.4% + 25 mA | |||||
| ±3 A | 10 μA | 0.05% + 2 mA | |||||
| ±1.5 A | 1 μA | 0.02% + 500 μA | |||||
| ±150 mA | 100 nA | 0.02% + 25 μA | |||||
| ±15 mA | 10 nA | 0.02% + 6 μA | |||||
| ±1.5 mA | 1 nA | 0.02% + 250 nA | |||||
| ±150 μA | 100 pA | 0.02% + 25 nA | |||||
| ±15 μA | 10 pA | 0.02% +3 nA | |||||
| ±1.5 μA2 | 1 pA | 0.03% + 450 pA | |||||
| ±150 nA2 | 100 fA | 0.05% + 250 pA | |||||
| Temperature coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
- 10 A range is available only for pulse mode, accuracy specifications for 10 A range are typical.
- Low Current Measurements，Triaxial Cable is recommended to connect: Force Hi connect to core cable, Guard connects to inner shield, outer shield connects to protective ground, Force Lo connect to core cable, inner shield not connect, and outer shield connect to protective ground. Triaxial Cable rated insulation voltage is not less than 250V.
Resistance measurement specifications （4W）
| Resistance measurement accuracy | Range | Measurement resolution | Test current | Accuracy (1 Year) ± (% reading+ offset) |
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| 1 Ω | 1 μΩ | 1.5 A | 0.073% +0.3334 mΩ | ||||
| 10 Ω | 10 μΩ | 150 mA | 0.057% + 3.334 mΩ | ||||
| 100 Ω | 100 μΩ | 15 mA | 0.08% + 33.34 mΩ | ||||
| 1 kΩ | 1 mΩ | 1.5 mA | 0.057% + 333.4 mΩ | ||||
| 10 kΩ | 10 mΩ | 150 μA | 0.057% + 3.334 Ω | ||||
| 100 kΩ | 100 mΩ | 15 μA | 0.06% + 33.34 Ω | ||||
| 1 MΩ | 1 Ω | 1.5 μA | 0.06% + 333.4 Ω | ||||
| 10 MΩ | 10 Ω | 0.15 μA | 0.35% + 3.334 kΩ | ||||
| 100 MΩ | 100 Ω | 0.05 μA | 0.95% + 10 kΩ | ||||
| Temperature coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
| Source I mode, manual Ohm measurement (4-wire) |
Total error = Vmeas/Isrc = R reading x (gain error % of V range + gain error % of I range + offset error of I source range/Isrc value %) + (offset error of V measure range/Isrc value) Example：I source value=1.5A at 1.5A range V measure range=6V range Total error(% reading + offset) =(0.02%+0.02%+500μA/1.5A)+(500μV/1.5A) ≈ 0.073%+0.3334mΩ | ||||||
Pulse source specifications （4W）
| Minimum programmable pulse width | 100 μs | ||||||
| Pulse width programming resolution | 1 μs | ||||||
| Pulse width programming accuracy | ±10 μs | ||||||
| Pulse width jitter | 2 μs | ||||||
| Pulse width definition | The time from 10 % leading to 90 % trailing edge as follows |
| Item | Maximums | Maximum pulse width | Maximum duty cycle | ||||
| 1 | 0.15 A/200 V | DC,no limit | 1 | ||||
| 2 | 1.5 A/20 V | DC,no limit | 1 | ||||
| 3 | 3 A/6 V | DC,no limit | 1 | ||||
| 4 | 3 A/20 V | 1 ms | 0.1 | ||||
| 5 | 10 A/6 V | 1 ms | 0.1 |
Typical Pulse Performance（4W）
| Source | range | Typical rise time1,3 | Typical Settling Time2,3 | Test load | |||
| Voltage | 200 V | 600 μs | 1.5 ms | No load | |||
| 20 V | 200 μs | 360 μs | No load | ||||
| 6 V | 160 μs | 300 μs | No load | ||||
| Current | 10 A | 140 μs | 320 μs | Full load | |||
| 3 A | 120 μs | 280 μs | Full load | ||||
| 1.5 A | 120 μs | 280 μs | Full load | ||||
| 150 mA | 120 μs | 280 μs | Full load | ||||
| 15 mA | 120 μs | 280 μs | Full load | ||||
| 1.5 mA | 120 μs | 280 μs | Full load | ||||
- Leading edge, the time from 10 % leading to 90 % leading
- The time required from Pulse out 0 to reach within 1 % of final value
- Pulse current source base 6V voltage range and 105% range limit
I-V Out capability
Sampling rate and NPLC setting
| Setting | Range | ||||||
| NPLC | 0.00005 PLC ~ 10 PLC | ||||||
| Sampling Rate | 5 sps ~ 1 Msps |