WAT6200S
Serial Parametric Test System
WAT6200S is a serial parametric test system that can quickly perform accurate DC measurements, capacitance measurements, and other high-frequency applications (such as ring oscillator measurements), flash memory tests and so on.WAT6200S built-in a low-leakage switch matrix with 14 input ports and configurable, maximum 48 output ports (x12, x24, x36, x48). It supports a special pin connecting to prober chuck. WAT6200S supports up to 8 source measurement unit (SMU) inputs, each can source and measure individual current or voltage. The system supports up to 4 channels of high-voltage semiconductor pulse generation unit (HV-SPGU), providing fast pulse generation capabilities for modern advanced flash memory testing. The system also supports access to external instruments such as DVM, LCR, Signal Analyzer, etc. via 6 auxiliary input ports and is able to achieve high-precision serial measurements of voltage, capacitance, frequency, etc.
- Self-developed hardware resources – Self-developed SMU, PGU, Low-leakage Switch Matrix, stable supply chain, short lead time
- Flexible configuration of Pin number – Support 14 input ports, 48 output ports, independent port to chuck
reduced cost for upgrade - High precision -The accuracy down to 1pA, system leakage current ＜1pA, Extremely low current measurement
- SECS/GEM compliance -Easy integration to customer EAP or factory automation
- Built-in Maintenance software – Fast troubleshooting and diagnostic of hardware problem, timely guarantee of tester performance
- Compatible with 48pin 230mm-diamter probe card – Protect customer investment on probe card, low migration cost to new tester
- High adaptability and full compatibility – Familiar environment and easy to use, Python language for algo
- Compatible with mainstream probers –TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
System Configuration
| # | Category | Sub-Category | Description |
| 1 | System Cabinet | Cabinet | Rack, EMO, Power Supply and Distribution Unit |
| Controller | Win10 Workstation, ptSEMIGHT software suites | ||
| LCR | Optional
1fF~100nF range Frequency:1KHz~1MHz |
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| DMM | Optional
7 ½ display resolution |
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| Signal Analyzer | Optional
9K~10M frequency range |
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| 2 | Test Head | Test Head Mainframe | Mainframe, PXIe chassis for SMU & PGU |
| Low-leakage Switch Matrix | RM1010-LLC:
Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs), Output to Prober Chuck
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
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| Source Measure Unit
(SMU) |
S2012C (optional):
1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
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| Semiconductor Pulse Generator
(SPGU) |
S3023P (optional):
2x PCIe slots, ±40V(Open), ±20V(50Ω) |
System Functionality
| Application | |
| Inline E-test, BEOL WAT, WLR for Si/GaN/SiC wafer | |
| Test Items (typical) | |
| IV/CV | Id-Vd，Id-Vg，Vth，BV，Ig，Ioff，Gm |
| MIM_CAP，C & G | |
| Ic-Vc，BETA，BV | |
| Ron，R_tlm，Rsh_van | |
| Spot，Sweep，Search | |
| Kelvin & Non-Kelvin | |
| Differential Voltage | |
| Frequency | Ring Oscillator Frequency |
| Reliability | HCI，NBTI/PBTI，TDDB, etc. |
| DC | |
| Resource | Semight S2012C，S2016C |
| Function | Spot, Sweep |
| Range | S2012C：10fA to 1A, 100nV to 200V |
| S2016C: 1fA to 1A, 100nV to 200V | |
| Capacitance | |
| Resource | External LCR |
| Function | C/G |
| Frequency | 1kHz, 10kHz, 100kHz, 1MHz |
| Range | 1fF to 100nF |
| DC Bias | ±40 V |
| Differential Voltage | |
| Resource | External DMM |
| Range | 1µV to 100V |
| Pulse Generation | |
| Resource | Semight S3023P |
| Amplitude | ±40V (Open), ±20V(50Ω) |
| Frequency | 0.1Hz to 10MHz |
| Pulse Width | 60 ns to (Period – 60 ns) |
| Tr/Tf | 20 ns (Vamp < 5V, Open） |
| Frequency Measurement | |
| Resource | External Signal Analyzer |
| Frequency Range | 9K to 10M Hz |
| Low-leakage Switch Matrix | |
| Switch Matrix | Semight RM1010-LLC |
| Output Channels | x12, x24, x36, x48 |
| Interface | Maximum 8 input SMUs (2 for low leakage) |
| Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) | |
| Port to chuck | |