WAT6200S
WAT6200S
Serial Parametric Test System
The Semight WAT6200S Series Serial Parametric Test System delivers fast and accurate DC, capacitance, high-frequency, and flash memory testing. Available in WAT6210S and WAT6215S models, the system supports up to 8-channel SMU inputs, configurable as voltage or current sources and measurement units, and up to 4-channel high-voltage pulse generators (HV-SPGU) for advanced flash memory testing. The WAT6210S provides up to 48-channel low-leakage switch matrix output, while the WAT6215S supports 48-channel full Kelvin connections for automated or semi-automated probe stations. It also features 6 or 12 auxiliary instrument ports for integrating external devices such as DVMs, LCR meters, and signal analyzers, enabling precise serial measurements of voltage, capacitance, and frequency.
Features
Self-developed Hardware Resources
Self-developed SMU, PGU, Low-leakage Switch Matrix, stable supply chain,short lead time
Flexible Configuration of Pin Number
Supports 14 input ports, 48 output ports, independent port to chuck
Reduced cost for upgrad
Reduced cost for upgrad
High Precision
The accuracy down to 1 pA
System leakage current ＜1 pA
Extremely low current measurement
SECS/GEM Compliance
Easy integration to customer EAP or factory automation
Integrated GAL/DIAG/PV Software
Supports for customizable user testing logs
Helps users quickly locate issues
48pin 230 mm-diamter probe card
Protect customer investment on probe card, low migration cost to new tester
High Adaptability and Full Compatibility
Familiar environment and easy to use, python language for algo
Compatible with Mainstream Probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
System Configuration
WAT6200S Series
| NO. | Model | Product | Description |
| 1 | WAT6210S | Serial Parametric Test System | 200V,1Adc,100nV/1fA,48Pin |
| 2 | WAT6215S | Serial Parametric Test System | 200V,1Adc,100nv/1fA,48Pin full kelvin,Cable Out |
WAT6200S Series System Configuration
| Sub-Category | Description |
| Controller | Win10 Workstation, ptSEMIGHT software suites |
| LCR | Optional
1fF~100nF range Frequency:1KHz~1MHz |
| DMM | Optional
7 ½ display resolution |
| Signal Analyzer | Optional
9K~10M frequency range |
| Low-leakage Switch Matrix | RM1010-LLC:
Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs), Output to Prober Chuck
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
| PXIe Chassis | PXIe chassis compatible with SMU and SPGU quantities |
| Source Measure Unit (SMU) | S2012C (optional):
1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
| Semiconductor Pulse Generator (SPGU) | S3023P (optional):
2x PCIe slots, ±40V(Open), ±20V(50Ω) |
System Functionality
| Application | |
| Inline E-test, BEOL WAT, WLR for Si/GaN/SiC wafer | |
| Test Items (typical) | |
| IV/CV | Id-Vd, Id-Vg, Vth, BV, Ig, Ioff, Gm |
| MIM_CAP, C & G | |
| Ic-Vc, BETA, BV | |
| Ron, R_tlm, Rsh_van | |
| Spot, Sweep, Search | |
| Kelvin & Non-Kelvin | |
| Differential Voltage | |
| Frequency | Ring Oscillator Frequency |
| Reliability | HCI, NBTI/PBTI, TDDB, etc. |
| DC | |
| Resource | Semight S2012C, S2016C |
| Function | Spot, Sweep |
| Range | S2012C: 10fA to 1A, 100nV to 200V |
| S2016C: 1fA to 1A, 100nV to 200V | |
| Capacitance | |
| Resource | External LCR |
| Function | C/G |
| Frequency | 1kHz, 10kHz, 100kHz, 1MHz |
| Range | 1fF to 100nF |
| DC Bias | ±40 V |
| Differential Voltage | |
| Resource | External DMM |
| Range | 1µV to 100V |
| Pulse Generation | |
| Resource | Semight S3023P |
| Amplitude | ±40V (Open), ±20V(50Ω) |
| Frequency | 0.1Hz to 10MHz |
| Pulse Width | 60 ns to (Period – 60 ns) |
| Tr/Tf | 20 ns (Vamp < 5V, Open） |
| Frequency Measurement | |
| Resource | External Signal Analyzer |
| Frequency Range | 9K to 10M Hz |
| Low-leakage Switch Matrix | |
| Switch Matrix | Semight RM1010-LLC |
| Output Channels | x12, x24, x36, x48 |
| Interface |
Maximum 8 input SMUs (2 for low leakage) |
| Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) | |
| Port to chuck | |